BS ISO 18118:2015 pdf free.Surface chemical analysis – Auger electron spectroscopy and X-ray photoelectron spectroscopy一Guide to the use of experimentally determined relative sensitivity factors for the quantitative analysis of homogeneous materials.
BS ISO 18118 gives guidance on the measurement and use of experimentally determined relative sensitivity factors for the quantitative analysis of homogeneous materials by Auger electron spectroscopy and X-ray photoelectron spectroscopy.
2 Normative references
The following documents, in whole or in part, are normatively referenced in this document and are indispensable for its application. For dated references, only the edition cited applies. For undated references, the latest edition of the referenced document (including any amendments) applies.
ISO 18115, Surface chemical analysis — Vocabulary
ISO 21270, Surface chemical analysis — X-ray photoelectron andAuger electron spectrometers — Linearity
of intensity scale
3 Terms and definitions
For the purposes of this document, the terms and definitions given in ISO 18115 and the following apply.
absolute elemental sensitivity factor
coefficient for an element by which the measured intensity for that element is divided to yield the atomic concentration or atomic fraction of the element present in the sample
Note ito entry: The choice of use of atomic concentration or atomic fraction should be made clear. Note 2 to entry: The type ofsensitivityfactorused should beappropriate forthe equations used in the quantification process and for the type of sample analysed, for example, of homogeneous samples or segregated layers. Note 3 to entry: The source of the sensitivity factors should be given in order that the correct matrix factors or other parameters have been used.
Note 4 to entry: Sensitivity factors depend on parameters of the excitation source, the spectrometer, and the orientation of the sample to these parts of the instrument. Sensitivity factors also depend on the matrix being analysed and in SIMS, this has a dominating influence.
ISOURCE: ISO 18115:2013, modiliedJ
3.2 relative elemental sensitivity factor
coefficient proportional to the absolute elemental sensitivity factor (11). where the constant of proportionality is chosen such that the value for a selected element and transition is unity
Note ito entry: Elements and transitions commonly used are C is or F is for XPS and Ag M4,5VV for AES.
Note 2 to entry: The type of sensitivity factor used should be appropriate for the analysis, for example, of homogeneous samples or segregated layers.BS ISO 18118 pdf free download.
Tags: Surface chemical analysis
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